Alio Industries


Available in California Only

  • Linear Motion Systems
  • Air Bearing Systems
  • Rotary Motion systems


ALIO, (which is Latin for “A better way.”) is an innovator in nano technology motion systems. ALIO’s designs exceed current standards of precision product designs for automation technology. Holding two patents for the Parallel 6 Axis Hexapod and the Parallel 3 Axis Tripod as well as several patent pending for nano Z stages and planar air bearing systems, ALIO has set the pace for nano-precision design and systems.<
ALIO’s linear and rotary stage lines were designed to be cost effective and complement the market demand for high quality, nano-precision motion. These applications can be used in normal atmospheric environments, clean rooms, and vacuum chamber environments. ALIO’s design of the rotary stages can be utilized for stand-alone motion or stackable for various serial kinematic structures.


Linear Motion Systems
ALIO linear products have been designed and manufactured to have no equal in the world for performance and reliability. ALIO’s mechanical bearing stages bearing stages can perform at a level of precision that the competition struggles to match with their air bearing stages. ALIO’s focus on 6-D Nano Precision™ only while others design and build to the 2-D world of planar repeatability and accuracy keep ALIO on the leading edge. All of the product families of ALIO linear stages have world class performance with variation of components such as motors and encoders to fit demanding applications or cost sensitive systems.
Air Bearing Systems

ALIO Industries has development leading edge 6-D Nano Positioning™ air bearing motion system for a wide range of applications in manufacturing, inspection/repair and metrology. With several patent pending designs for Planar and Nano Z™ ALIO is well positioned for the next generation application demands of TRUE NANO™ precision in PV, Semiconductor, Ink Jet Deposition, Lithography and Optical Inspection.

The ALIO Industries Nano-Precision Planar Air Bearing System has raised the bar to a new level of performance for air bearing motion. This engineered system was designed to exceed today’s demanding requirements in semiconductor wafer, flat panel display, nano-manufacturing and optical inspection.

Rotary Motion Systems
Mechanical bearings rotary stages have been design with crossed roller bearings for improved stiffness for offset loads and rotational precision. Integrated with servo torque frameless motors these stage can handle most application where the mass and acceleration needs are extreme while still maintaining our nano precision performance. The ALIO attention to materials and machining is maintained in the rotary product line as with the linear products making sure the bearings and metal are located in ultra-machined parallel surfaces as shown by the machined lands on all stages.